PRODUCT
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Spinner for Research System
ASC - 5200
컴팩트한 디자인으로써 수동 작동하여 Spin coating 할수 있는 메뉴얼 시스템
제품개요
- Spin Speed : 0~ 6000 rpm ±1rpm
Spin Acceleration : ~ 10,000rpm/sec , max < 5%
Spin Motor : AC Servo Spin Motor 250W
Spin Bowl : Ø 330 HDPP Bottom & Top cup
Display : 7“ LCD Touch screen
Program : PLC, 50 Recipes / 20 Steps
Vacuum Pump : Oil-less Vacuum Pump
Power : 220VAC/110VAC, 5A
| 기판 SIZE | Pieces ~max Ø8 |
|---|---|
| 본체 치수 | 950WX 800DX 1650H |